Skip to Content

Fast atomic EELS analysis across the GaN/AlGaN interface

Methods

probe-corrected ARM 200F TEM/STEM microscope

C-FEG emission gun

GIF Quantum® ER system

voltage: 200 kV

data taken in STEM mode

EELS core-loss spectrum (200 – 2200 eV) exposure time: 10 ms

b
eam current: 45 pA

d
ataset size: 250 x 250 pixels

t
otal exposure time: 11 min